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ABSTRACT

During this presentation, activities of the PRIMS team (PRInted MemS) involved in MEMS applications will be first presented. PRIMS team activities cover the fields from the component design until the application with characterization and modeling as well as material patterning for the fabrication of printed microsystems, with various targeted applications.

Here, special attention will be paid to screen-printed MEMS applications. Indeed, among numerous technologies nowadays available for thick-films fabrication in microelectronics the very simple, flexible and cheap screen-printing equipment allows deposition of a large choice of materials on various substrates. Modifications of standard screen-printing have been therefore proposed for a few decade for integration purpose, fabrication of free-standing components, performance improvement or lower temperature processing. Polymer and nanopowders based thick-films are for instance important achievements, leading to various applications on flexible substrates because of low temperature processing. Thick printed PZT layers supported by a stainless steel substrate instead of rigid alumina or silicon substrates can lead to excellent performances such as flexibility, toughness and high-efficiency of power generation. In addition, by using a sacrificial layer process, promising performances of free standing electroded PZT thick films for microsystems applications will be discussed. Applications for gas detection, actuation, structural health monitoring or energy harvesting will be presented. As well, printed resistive layers based on SnO2, ZnO or black carbon have been used for gas detection. Finally, potentiality of carbon based organic cantilevers for gas sensing or energy harvesting will be highlighted.

BIOGRAPHY

Hélène Debéda received her PhD in materials engineering from the University of Bordeaux in 1996 for her work entitled, “The selectivity and reliability of thick film methane gas sensors”. She returned to her alma mater as a faculty member in 2001 and is now an Associate Professor in the IMS Laboratory, and currently belongs to the Organic and MEMS group where her research focuses on alternative technologies to silicon for MEMS studies. Hélène also serves as Team Leader for the IMS technological platform TAMIS (Technologies Alternatives aux Microsystèmes Silicium).

She has authored 29 publications in international journals, 2 book chapters, and has 2 international patents. She has spoken at 58 international conferences, 9 invited talks and in the past three years has collaborated with researchers in Spain, Canada, Thailand and France.

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