Manipulation in hazardous environments
Teleoperation of magnetically levitated robotic systems are widely used in operations in hazardous environments. In this way, secure operation and safe handling of materials can be achieved in nuclear reactors and biohazard laboratories.
Clean rooms applications
Magnetic levitation is also appropriate for stepper stages in photolithography. The magnetically levitated stages can be positioned with nanoprecision and allow roll, pitch and yaw motions. Since energy is provided outside, thermal extension problems are overcome.
Wind tunnel testing
Since magnetic levitation enables contactless manipulation of objects, it is favorable for wind tunnel testing. Magnetic levitation is extensively used by top aircraft and missile companies to test aerodynamics of their designs.
Wafer growth and wafer transportation
High precision magnetic levitation systems are ideal for wafer growth from silicon melt because magnetic levitation is a dust free operation. In recent years, maglev transportation systems are realized utilizing silicon wafer transport with no risk of contamination.